The increasing demand for miniaturisation of devices has established laser micromachining as the preferred fabrication method in many industrial applications. Indeed, do to their short wavelength (up to UV regime), short pulselength (nanosecond regime) and excellent beam quality (TEM00 mode), the innovative laser sources (DPSSL) have gained recognition by industry as competitive solution for material processing applications such as precision drilling, cutting and milling. Depending on the chosen wavelength and configuration, these laser sources are capable of directly machining a wide range of micron scale features in a large range of materials, including metals, semiconductors, ceramics, hard materials, polymers and glasses.